3D Laser Scanning Confocal Microscope
VK-X series
Recommended Replaceable Products: Measurement head - VK-X3100
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Measurement head: Violet semiconductor laser VK-X1100
*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.
Specifications
Model | VK-X1100 | |||
Type | measurement head | |||
Total magnification | Up to 28,800 x*1 | |||
Field of view (minimum range) | 11 to 7,398 µm | |||
Frame rate (laser measurement speed) | 4 to 125 Hz, 7,900 Hz*2 | |||
Measurement principle | Optical system | Pinhole confocal optical system, Focus variation | ||
Light-receiving element | 16-bit sensing: photomultiplier, High-definition colour CMOS | |||
Scanning method (during general measurement and image stitching) | Automatic upper/lower limit setting, rapid laser light intensity setting (AAGII) , automatic detection and rescanning in case of poor reflection (double scan) | |||
Height measurement | Display resolution | 0.5 nm | ||
Linear scale | ||||
Dynamic range | 16 bits | |||
Repeatability σ | Laser confocal | 20 x, 40 nm; 50 x, 12 nm | ||
Focus variation | 5 x, 500 nm; 10 x, 100 nm; 20 x, 50 nm; 50 x, 20 nm | |||
Height data acquisition range | 0.7 million steps | |||
Accuracy | 0.2 + L /100 µm or better*3 | |||
Width measurement | Display resolution | 1 nm | ||
Repeatability 3σ | Laser confocal | 20 x, 100 nm; 50 x, 40 nm | ||
Focus variation | 5 x, 400 nm; 10 x, 400 nm; 20 x, 120 nm; 50 x, 50 nm | |||
Accuracy | ±2 %*3 | |||
XY stage configuration | Manual: Moving range | 70 mm x 70 mm | ||
Motorised: Moving range | 100 mm x 100 mm | |||
Observation | Image options | High-definition colour CMOS image 16-bit laser colour confocal image Confocal optical system with ND filter C-laser DIC image (differential interference image) | ||
Illumination | Ring illumination, coaxial illumination | |||
Laser light source for measurements | Wavelength | Violet semiconductor laser, 404 nm | ||
Maximum output power | 1 mW | |||
Laser class | Class 2 laser product (IEC60825-1) | |||
Power supply | Power voltage | 100 to 240 VAC, 50/60 Hz | ||
Current consumption | 150 VA | |||
Weight | Approx. 13.0 kg | |||
*1 23 inch full-screen display. |