3D Laser Scanning Confocal Microscope
VK-X series
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Shape Measurement Laser Microscope VK-X200K
*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.
Specifications
Model | VK-X200K | |||
Type | Controller | |||
Objective lens magnification | Magnification on a 15” monitor 100x | ― | ||
Magnification on a 15” monitor 200x | ||||
Magnification on a 15” monitor 400x | ||||
Magnification on a 15” monitor 1000x | ||||
Magnification on a 15” monitor 2000x | ||||
Magnification on a 15” monitor 3000x | ||||
Observation/ | Horizontal (H): μm | Magnification on a 15” monitor 100x | ||
Magnification on a 15” monitor 200x | ||||
Magnification on a 15” monitor 400x | ||||
Magnification on a 15” monitor 1000x | ||||
Magnification on a 15” monitor 2000x | ||||
Magnification on a 15” monitor 3000x | ||||
Vertical (V): μm | Magnification on a 15” monitor 100x | |||
Magnification on a 15” monitor 200x | ||||
Magnification on a 15” monitor 400x | ||||
Magnification on a 15” monitor 1000x | ||||
Magnification on a 15” monitor 2000x | ||||
Magnification on a 15” monitor 3000x | ||||
Working distance: mm | Magnification on a 15” monitor 100x | |||
Magnification on a 15” monitor 200x | ||||
Magnification on a 15” monitor 400x | ||||
Magnification on a 15” monitor 1000x | ||||
Magnification on a 15” monitor 2000x | ||||
Magnification on a 15” monitor 3000x | ||||
Numerical Aperture (N.A.) | Magnification on a 15” monitor 100x | |||
Magnification on a 15” monitor 200x | ||||
Magnification on a 15” monitor 400x | ||||
Magnification on a 15” monitor 1000x | ||||
Magnification on a 15” monitor 2000x | ||||
Magnification on a 15” monitor 3000x | ||||
Optical zoom | 1x to 8x | |||
Total magnification | 200x to 24000x | |||
Optical system for observation/measurement | Pinhole confocal optical system | |||
Height measurement | Measuring range | 7 mm | ||
Z-resolution | 0.0005 µm | |||
Repeatability σ | 0.012 µm*1 | |||
Width measurement | Display resolution | 0.001 µm | ||
Repeatability 3σ | 0.02 µm*2 | |||
Frame memory | Pixel count | 2048 x 1536, 1024 x 768, 1024 x 64 | ||
For monochrome image | 16 bit | |||
For colour image | 8-bit for RGB each | |||
For height measurement | 24-bit | |||
Frame rate | Surface scan | 4 Hz to 120 Hz | ||
Line scan | 7900 Hz | |||
Auto function | AAG (Auto gain), Auto focus, Auto upper/lower limit setting, Double Scan brightness settings | |||
Measurement laser light source for measurements | Wavelength | Violet laser, 408 nm | ||
Maximum output power | 0.95 mW | |||
Laser Class | Class 2 Laser Product (IEC 60825-1, FDA (CDRH) Part1040.10 *3) | |||
Laser light-receiving element | PMT (Photoelectron Multiplier Tube) | |||
Light source for | Lamp | 100 W halogen lamp | ||
Colour camera for | Imaging element | 1/3" Colour CCD image sensor | ||
Recording resolution | Super high resolution (3072×2304) | |||
Auto adjustment | Gain, Shutter speed | |||
Data processing unit | Dedicated PC, supplied by KEYENCE with the VK-X (OS: Windows 7 Professional Edition) *4 | |||
Rating | Power voltage | 100 to 240 VAC ±10 %, 50/60 Hz | ||
Power consumption | 450 VA max. | |||
Weight | Approx. 11 kg | |||
*1 When a standard height difference of 2 µm is measured with the 50x objective lens. |