3D Laser Scanning Confocal Microscope
VK-X series
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Measurement unit VK-X160K
*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.
Specifications
Model | VK-X160K | |||
Total magnification | Up to 19200×*1 | |||
Field of view (minimum range) | 16 to 5400 µm | |||
Frame rate | Laser measurement speed | 4 to 120 Hz, 7,900 Hz*2 | ||
Measurement principles | Optical system | Pinhole confocal optical system | ||
Height measurement | Linear scale | 5 nm | ||
Repeatability σ | 20×: 40 nm, 50×: 20 nm, 100×: 20 nm *3 | |||
Memory for Z-axis measurement | 1.4 million steps | |||
Accuracy | 0.2 + L/100 µm or better*4*5 | |||
Width measurement | Display resolution | 10 nm | ||
Repeatability 3σ | 20×: 100 nm, 50×: 50 nm, 100×: 30 nm*3 | |||
Accuracy | ±2%*3 | |||
XY stage configuration | Manual: Operating range | 70 mm×70 mm | ||
Motorized: Operating range | 50 × 50 mm, 100 × 100 mm*6 | |||
Observation | Maximum capture resolution | 3072×2304 | ||
Weight | Microscope | Approx. 25 kg (without sensor head, approx. 8.5 kg) | ||
Controller | Approx. 11 kg | |||
*1 With a 23-inch monitor. |