Wide-Area 3D Measurement System

VR series

This model has been discontinued.
Compliance with the certification standard is ensured as of the time of shipment from our company.

Recommended Replaceable Products: 3D Optical Profilometer Head (Fully-automated model) - VR-6200

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Wide-Area 3D Measurement System Macroscope Head VR-3200

VR-3200 - Wide-Area 3D Measurement System Macroscope Head

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

  • CE Marking
  • CSA

Specifications

Model

VR-3200

Type

Head

Applicable controller

VR-3000K

Field-of-view

Wide-field mode

Magnification on a
15" monitor 12x

Horizontal

24 mm

Vertical

18 mm

Magnification on a
15" monitor 25x

Horizontal

12 mm

Vertical

9 mm

Magnification on a
15" monitor 38x

Horizontal

8 mm

Vertical

6 mm

Magnification on a
15" monitor 50x

Horizontal

Vertical

4.5 mm

High magnification mode

Magnification on a
15" monitor 40x

Horizontal

7.6 mm

Vertical

5.7 mm

Magnification on a
15" monitor 80x

Horizontal

3.8 mm

Vertical

2.9 mm

Magnification on a
15" monitor 120x

Horizontal

2.5 mm

Vertical

1.9 mm

Magnification on a
15" monitor 160x

Horizontal

Vertical

1.4 mm

Zoom

1x to 4x

Measurement
accuracy

Height measurement

±3 µm*1

Width measurement

Wide-field mode: ±5 µm, High magnification mode: ±2 µm*1

Stitching function

Full automatic (XY stage automatic control + auto focus) measurement*2
Auto adjustment, Auto template analysis*2

Stage

Z stroke

90 mm (electric)

Rotation

±180°(sample rotating stage)

Tilt

±30° or more

Working distance

75 mm

Image receiving element

4 megapixel monochrome CMOS

Transmitter lens

Double telecentric lens x2

Receiver lens

Double telecentric lens

Light sources

Observation light source

LED ring light (red, green, blue)

Measurement light source

White LED

Image size

1024 x 768 pixels, 2048 x 1536 pixels

Rating

Power voltage

100 to 240 VAC ±10 %, 50/60 Hz

Power consumption

150 VA

Environmental resistance

Ambient temperature

+15 to +30 °C

Relative humidity

35 to 80 % RH (No condensation)

Weight

28.0 kg

*1 Value obtained using KEYENCE's specified standard gauge with measurement in KEYENCE's specified measurement mode (ambient temperature: 23±1°C).
*2 The stitching module (VR-H2J) is required.

Data Sheet (PDF) Other Models