Wide-Area 3D Measurement System

VR series

This model has been discontinued.
Compliance with the certification standard is ensured as of the time of shipment from our company.

Recommended Replaceable Products: 3D Optical Profilometer Head (Fully-automated model) - VR-6200

Wide-Area 3D Measurement System Head VR-5200

VR-5200 - Wide-Area 3D Measurement System Head

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

Data Sheet (PDF)

Specifications

Model				VR-5200
Type				Head
Light sources	Observation light source			LED ring light (red, blue, green)
	Measurement light source			White LED
Controller				VR-5000
Field-of-view	Low magnification (wide field of view)	Magnification on a 15" monitor 12×	Horizontal	24.0 mm
			Vertical	18.0 mm
		Magnification on a 15" monitor 25×	Horizontal	12.0 mm
			Vertical	9.0 mm
		Magnification on a 15" monitor 38×	Horizontal	8.0 mm
			Vertical	6.0 mm
		Magnification on a 15" monitor 50×	Horizontal
			Vertical	4.5 mm
	High magnification (high resolution)	Magnification on a 15" monitor 40×	Horizontal	7.6 mm
			Vertical	5.7 mm
		Magnification on a 15" monitor 80×	Horizontal	3.8 mm
			Vertical	2.9 mm
		Magnification on a 15" monitor 120×	Horizontal	2.5 mm
			Vertical	1.9 mm
		Magnification on a 15" monitor 160×	Horizontal
			Vertical	1.4 mm
Zoom				1× to 4×
Height measurement	Display resolution			0.1 µm
	Height measurement range	Without Z stitching		Low magnification (wide field of view) : 10 mm High magnification (high resolution) : 1 mm
		With Z stitching		Low magnification (wide field of view) : 50 mm High magnification (high resolution) : 30 mm
	Repeatability (σ)	Without Z stitching		0.4 µm^*1
		With Z stitching		1.0 µm^*1
	Measurement accuracy	Without Z stitching		±2.5 µm^*1
		With Z stitching		±4.0 µm^*1
Width measurement	Repeatability (σ)			Low magnification (wide field of view) : 1 µm High magnification (high resolution) : 0.5 µm ^*1
	Measurement accuracy			Low magnification (wide field of view) : ±5 µm High magnification (high resolution) : ±2 µm ^*1
Stitching function				Fully-automated measurement (XY automatic control + Z automatic control) , Automatic mapping creation, Automatic area setting^*2
XY measurable range				206 x 104 mm^*2
Stage	XY stroke			184 x 88 mm (motorised)
	Z stroke			73 mm (motorised)
	Load capacity			4.5 kg
Working distance				75 mm
Image receiving element				4 megapixel monochrome CMOS
Transmitter lens				Double-telecentric lens x 2
Receiver lens				Double-telecentric lens
Data processing				Dedicated PC specified by KEYENCE (OS: Windows 10 Pro)
Power supply	Power voltage			100 to 240 VAC, 50/60 Hz
	Power consumption			200 VA max.
Environmental resistance	Ambient temperature			+15 to 30 °C
	Relative humidity			20 to 80 % RH (no condensation)
Weight				Approx. 28 kg^*3
^1 Value obtained using KEYENCE’s specified standard gauge with measurement in KEYENCE’s specified measurement mode (ambient temperature: 23 ±1 °C ) ^2 Measurement expansion module (VR-H3J) required ^*3 Weight of only measurement unit: Approx. 11 kg

Data Sheet (PDF) Other Models