3D Laser Scanning Confocal Microscope

VK-X series

This model has been discontinued.
Compliance with the certification standard is ensured as of the time of shipment from our company.

Recommended Replaceable Products: 3D Laser Scanning Microscope - VK-X3000 series

Shape Measurement Laser Microscope VK-X105

VK-X105 - Shape Measurement Laser Microscope

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

  • CE Marking
  • CSA

Specifications

Model

VK-X105

Type

Measurement unit

Objective lens magnification

Magnification on a 15” monitor 100x

5x

Magnification on a 15” monitor 200x

10x

Magnification on a 15” monitor 400x

20x

Magnification on a 15” monitor 1000x

50x

Observation/
measuring range

Horizontal (H): μm

Magnification on a 15” monitor 100x

2700

Magnification on a 15” monitor 200x

1350

Magnification on a 15” monitor 400x

675

Magnification on a 15” monitor 1000x

270

Vertical (V): μm

Magnification on a 15” monitor 100x

2025

Magnification on a 15” monitor 200x

1012

Magnification on a 15” monitor 400x

506

Magnification on a 15” monitor 1000x

202

Working distance: mm

Magnification on a 15” monitor 100x

22.5

Magnification on a 15” monitor 200x

16.5

Magnification on a 15” monitor 400x

3.1

Magnification on a 15” monitor 1000x

0.54

Numerical Aperture (N.A.)

Magnification on a 15” monitor 100x

0.13

Magnification on a 15” monitor 200x

0.3

Magnification on a 15” monitor 400x

0.46

Magnification on a 15” monitor 1000x

0.8

Optical zoom

1x to 8x

Total magnification

100x to 8000x

Optical system for observation/measurement

Pinhole confocal optical system

Height measurement

Measuring range

7 mm

Z-resolution

0.005 µm

Repeatability σ

0.02 µm*1

Width measurement

Display resolution

0.01 µm

Repeatability 3σ

0.05 µm*2

Frame memory

Pixel count

2048 x 1536, 1024 x 768, 1024 x 64

For monochrome image

16 bit

For colour image

8-bit for RGB each

For height measurement

21-bit

Frame rate

Surface scan

4 Hz to 120 Hz

Line scan

7900 Hz

Auto function

AAG (Auto gain), Auto focus, Auto upper/lower limit setting, Double Scan brightness settings

Measurement laser light source for measurements

Wavelength

Red semiconductor laser, 658 nm

Maximum output power

0.95 mW

Laser Class

Class 2 Laser Product (IEC 60825-1, FDA (CDRH) Part1040.10 *3)

Laser light-receiving element

PMT (Photoelectron Multiplier Tube)

Light source for
optical observation

Lamp

100 W halogen lamp

Colour camera for
optical observation

Imaging element

1/3" Colour CCD image sensor

Recording resolution

Super high resolution (3072×2304)

Auto adjustment

Gain, Shutter speed

Data processing unit

Dedicated PC, supplied by KEYENCE with the VK-X (OS: Windows 7 Professional Edition) *4

Software

Auto-focus software

This is software that automatically focuses the image during observation.

Pixel shift software

This is software that increases the number of pixels recorded by shifting pixels during image recording.

HDR function software

This is software that obtains 16-bit data to optimize the image appearance.

RPD function software

This is an algorithm that detects the measurement result quickly and accurately.

AAG function software

This is software that automatically adjusts the laser light-receiving sensitivity within the setting range.

Auto upper/lower limit setting software

This is software that automatically recognizes the upper and lower limits of the target and sets the measurement range.

Beginner mode function software

This is software that can be used to easily perform measurements as flow charts.

Comment function software

This is software that displays comments on the observation screen.

Measurement and scale display software

This is software that displays a scale on the dimension measurement and observation screen.

Rating

Power voltage

100 to 240 VAC ±10 %, 50/60 Hz

Power consumption

450 VA max.

Weight

Approx. 25 kg (Measuring head detached: approx. 8.5 kg)

*1 When a standard height difference of 2 µm is measured with the 50x objective lens.
*2 When the KEYENCE reference chart line width of 1 µm is measured with the 50 x objective lens (optical zoom 2 x) in line peak mode (image averaging: 8 times).
*3 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice.
*4 Windows 7 is a registered trademark of Microsoft, U.S.A.

Data Sheet (PDF) Other Models